Nanosystems Physics Chemistry Mathematics,
Год журнала:
2024,
Номер
15(4), С. 520 - 529
Опубликована: Авг. 30, 2024
The
production
of
nano-sized
semiconductor
oxide
materials,
such
as
indium-gallium-zinc
(IGZO),
will
make
it
possible
to
use
for
the
transistors
manufacture
using
printing
methods.The
sol-gel
method
is
one
widely
known
and
used
methods
producing
materials.As
known,
a
chelating
reagent
(complexing
agent)
can
influence
both
synthesis
process
final
phase
composition.The
results
with
various
reagents:
citric
acid,
ethylene
glycol,
oxalic
urea,
glycerol
sucrose
are
presented.The
samples
were
studied
by
X-ray
diffraction.It
was
found
that
glycol
reagents
obtain
homogeneous
crystalline
material
at
900
•
C
YbFe
2
O
4
-type
structure,
R-3m
(166)
space
group.Unit
cell
parameters
crystallite
size
(Halder-Wagner
method)
InGaZnO
single-phase
calculated.KEYWORDS
oxide,
In-Ga-Zn-O,
IGZO,
method,
complexing
agent,
reagent,
formation,
nanomaterial
ACKNOWLEDGEMENTS
This
study
represents
an
integration
two
diverse
projects
supported
Russian
Science
Foundation
(No.
24-19-00468;
conceptualization,
comparative
analysis
agents
on
processes,
well
detailed
characterization
IGZO-3,
IGZO-4,
IGZO-5,
IGZO-6)
Ministry
Higher
Education
Federation
(Goszadaniye
No.
075-03-2024-117,
project
FSMG-
Nanosystems Physics Chemistry Mathematics,
Год журнала:
2024,
Номер
15(4), С. 520 - 529
Опубликована: Авг. 30, 2024
The
production
of
nano-sized
semiconductor
oxide
materials,
such
as
indium-gallium-zinc
(IGZO),
will
make
it
possible
to
use
for
the
transistors
manufacture
using
printing
methods.The
sol-gel
method
is
one
widely
known
and
used
methods
producing
materials.As
known,
a
chelating
reagent
(complexing
agent)
can
influence
both
synthesis
process
final
phase
composition.The
results
with
various
reagents:
citric
acid,
ethylene
glycol,
oxalic
urea,
glycerol
sucrose
are
presented.The
samples
were
studied
by
X-ray
diffraction.It
was
found
that
glycol
reagents
obtain
homogeneous
crystalline
material
at
900
•
C
YbFe
2
O
4
-type
structure,
R-3m
(166)
space
group.Unit
cell
parameters
crystallite
size
(Halder-Wagner
method)
InGaZnO
single-phase
calculated.KEYWORDS
oxide,
In-Ga-Zn-O,
IGZO,
method,
complexing
agent,
reagent,
formation,
nanomaterial
ACKNOWLEDGEMENTS
This
study
represents
an
integration
two
diverse
projects
supported
Russian
Science
Foundation
(No.
24-19-00468;
conceptualization,
comparative
analysis
agents
on
processes,
well
detailed
characterization
IGZO-3,
IGZO-4,
IGZO-5,
IGZO-6)
Ministry
Higher
Education
Federation
(Goszadaniye
No.
075-03-2024-117,
project
FSMG-
