ACS Applied Polymer Materials, Год журнала: 2024, Номер unknown

Опубликована: Ноя. 22, 2024

In this study, we successfully synthesized and assessed eco-friendly water-soluble polymers containing photoreversible coumarin groups as dual-tone photoresists. The do not require any photoinitiator or photoactive compound can be used both negative- positive-type photoresists by simply controlling the exposure conditions. monomer, 7-(4-vinyl-benzyloxyl)-coumarin (VBCC), incorporating a group, was through etherification between 4-vinyl benzyl chloride 7-hydroxycoumarin, with its chemical structure confirmed NMR FT-IR spectroscopies. Subsequently, VBCC underwent polymerization sodium p-styrenesulfonate (NaSS) to impart water solubility. of P(VBCC-co-NaSS) at various monomer ratios also verified using spectroscopies, while reaction UV–vis spectroscopic techniques. Under 365 nm UV exposure, cyclobutane ring formed via photodimerization groups, which then cleaved reverted original under DUV exposure. solubility increased higher NaSS amount, albeit expense photospeed. Considering photospeed, ratio 6:4 chosen optimal photoresist. Well-defined patterns could achieved depending on photolithographic processes. This study underscores potential an environmentally friendly, water-processable,

Язык: Английский