International Journal of Applied Mechanics, Год журнала: 2024, Номер 16(03)

Опубликована: Янв. 27, 2024

In recent years, researchers have shown interest in using elastomers with high dielectric constant and good elasticity capacitive MEMS. This paper aims to investigate how the performance of sensors/actuators is affected by temperature-dependent behavior gap-filling Polydimethylsiloxane (PDMS). As a case study, model created, consisting proof mass two attached flexible microbeams parallel stationary electrode, under electrostatic actuation. The actuation directly proportional constant. To reduce resistance stiffness, bulk PDMS was assumed porosity, resulting nonlinear displacement-dependent Young’s modulus. system’s static dynamic responses were obtained solving governing equations Galerkin-based numerical procedures. Additionally, physically gradient-descent-based learning method used predict frequency response system. results that instead an air gap significantly reduces required voltage, although this difference less pronounced at higher temperatures. addition, inclusion alters resonance system also reducing temperature diminishes softening specific bias AC voltages.

Язык: Английский