III-nitride-based monolithic integration: From electronics to photonics DOI

Yijian Song,

Rui He, Junxue Ran

и другие.

Applied Physics Reviews, Год журнала: 2025, Номер 12(2)

Опубликована: Апрель 1, 2025

Over the past two decades, successful growth of high-quality wide-bandgap III-nitrides has made realization a broad range new device applications, including optoelectronic and microelectronic fields. Through monolithic integration photonic electronic devices simultaneously, different functional modules can be integrated on same wafer, eliminating parasitic effects caused by redundant external components, enhancing system robustness saving chip area. The scalable circuits have great potential for hybrid integration. This paper reviews latest research progress in III-nitride optoelectronics microelectronics recent years, especially gallium nitride-based light emitting diodes, laser high-electron-mobility transistors. We further analyze development status challenges power from perspectives process fabrication structure. applications systems are presented detail, sensing on-chip optical communication. Finally, we summarize current state development, opportunities, integration, providing insights into advancement semiconductors post-Moore's law era.

Язык: Английский

Polarization-Sensitive Solar-Blind Ultraviolet Photodetectors Based on Semipolar (112̅2) AlGaN Film DOI

Yaqi Gao,

Yali Yu,

Jiankun Yang

и другие.

ACS Applied Materials & Interfaces, Год журнала: 2025, Номер unknown

Опубликована: Янв. 31, 2025

Wide bandgap semiconductor AlGaN alloys have been identified as key materials to fabricate solar-blind ultraviolet photodetectors (SBUV PDs). Herein, a self-driven SBUV polarization-sensitive PD (PSPD) based on semipolar (112̅2)-oriented films is reported. Using the flow-rate modulation epitaxy method, full widths at half maximum (FWHMs) for obtained (112̅2) along [112̅3̅] and [11̅00] rocking curves are 0.205° 0.262°, respectively, representing best results heteroepitaxial so far. Density functional theory calculations experimental reveal that possesses in-plane anisotropy. The PSPDs exhibit strong photoresponse with polarization ratio of 1.54 266 nm rapid response 450/450 ms compared other low-dimensional materials. More interestingly, we observe positive negative behaviors under UV light illumination due surface states charge transfer. Our may enable potential applications in multifunctional optoelectronic devices.

Язык: Английский

Процитировано

0

Preparation and application of two-dimensional gallium nitride - A short review DOI
Hongbin Zhai, Ben Cao,

Changtong Wu

и другие.

Materials Science in Semiconductor Processing, Год журнала: 2025, Номер 193, С. 109512 - 109512

Опубликована: Апрель 2, 2025

Язык: Английский

Процитировано

0

Highly oriented and wafer-scale exfoliation of h-BN grown on AlN by metalorganic chemical vapor deposition DOI
Yang Qichao, Jiaxin Liu,

Yiwei Duo

и другие.

Applied Physics Letters, Год журнала: 2025, Номер 126(13)

Опубликована: Апрель 1, 2025

Hexagonal boron nitride (h-BN) and aluminum (AlN) are highly suitable for the development of flexible nitride-based ultraviolet devices. However, there limited reports on integration high-quality h-BN within III-nitride systems. We have fabricated thickness-controllable a step-flow AlN template using two-step growth method through metalorganic chemical vapor deposition (MOCVD). Due to formation etched defects during one-step growth, grown at 1460 °C presents disordered layer near defect region, adversely impacting subsequent uniformity h-BN. In contrast, by process exhibits well-defined layered alignment parallel interface, with strong x-ray diffraction peaks 26.7° narrow Raman E2g peak, due reducing epitaxial interface. Finally, well-ordered is achieved wafer-scale mechanical exfoliation epilayer has been realized clean surface. This work significance substrate thermal stability MOCVD highlights great potential in fabrication

Язык: Английский

Процитировано

0

III-nitride-based monolithic integration: From electronics to photonics DOI

Yijian Song,

Rui He, Junxue Ran

и другие.

Applied Physics Reviews, Год журнала: 2025, Номер 12(2)

Опубликована: Апрель 1, 2025

Over the past two decades, successful growth of high-quality wide-bandgap III-nitrides has made realization a broad range new device applications, including optoelectronic and microelectronic fields. Through monolithic integration photonic electronic devices simultaneously, different functional modules can be integrated on same wafer, eliminating parasitic effects caused by redundant external components, enhancing system robustness saving chip area. The scalable circuits have great potential for hybrid integration. This paper reviews latest research progress in III-nitride optoelectronics microelectronics recent years, especially gallium nitride-based light emitting diodes, laser high-electron-mobility transistors. We further analyze development status challenges power from perspectives process fabrication structure. applications systems are presented detail, sensing on-chip optical communication. Finally, we summarize current state development, opportunities, integration, providing insights into advancement semiconductors post-Moore's law era.

Язык: Английский

Процитировано

0