Wheatstone Bridge MEMS Hydrogen Sensor with ppb-Level Detection Limit Based on the Palladium–Gold Alloy DOI
Ruihao Wang, Xing Zhang, Xiaoqi Feng

и другие.

ACS Sensors, Год журнала: 2024, Номер 9(11), С. 6082 - 6091

Опубликована: Ноя. 5, 2024

On some occasions, such as new energy clinics, monitoring the trace hydrogen at ppb level is necessary. The traditional resistive sensors based on Pd alloys are very difficult to realize an extremely low detection limit. To achieve a limit and also ensure good stability, MEMS sensor was designed in suspended Wheatstone bridge structure, with all four arms defined sputtered Pd-Au alloy thin film. For sensor, absolute response (

Язык: Английский

Surface acoustic wave gas Sensors: Recent developments and their role in sensing technology DOI Creative Commons
Sankar Ganesh Ramaraj,

Amal Alrebh,

Durgadevi Elamaran

и другие.

Materials Science and Engineering B, Год журнала: 2025, Номер 317, С. 118157 - 118157

Опубликована: Март 4, 2025

Язык: Английский

Процитировано

2

Parts-per-Trillion-Level Acetone Gas Detection Using a Suspended Graphene/SiO2 SAW Breath and Skin Gas Sensor: Simulation and Experimental Study DOI
Hao‐Long Zhou, Sankar Ganesh Ramaraj, Md Shamim Sarker

и другие.

ACS Sensors, Год журнала: 2025, Номер unknown

Опубликована: Фев. 13, 2025

Detection of parts-per-trillion (ppt)-level acetone gas molecules at room temperature using suspended graphene on SiO2 micropillars has rarely been achieved solid-state devices or surface acoustic wave (SAW) sensors. This paper presents the effect and as a guiding sensing layer to detect gas. The integration with introduces coupled resonance arising from interaction between mechanical vibrations micropillars. leads formation hybrid modes when natural frequencies align. coupling mechanism amplifies displacement energy Love propagating along sensor, enhancing its overall performance. Additionally, waves generates characteristic dips in transmission spectra. These correspond excitation specific flexural torsional within structure. A custom-fabricated SAW device, featuring diameter 4 μm heights 1.0 1.2 μm, demonstrated exceptionally high sensitivity toward concentration 500 ppt. Moreover, exhibited rapid response recovery times across wide range concentrations.

Язык: Английский

Процитировано

0

Stabilizing PdAu hydrogen sensors: Mechanistic insights into metastable PdO and dual strategies of refresh and plasma treatment DOI
Ruihao Wang, Xing Zhang, Xiaoqi Feng

и другие.

Chemical Engineering Journal, Год журнала: 2025, Номер unknown, С. 163420 - 163420

Опубликована: Май 1, 2025

Язык: Английский

Процитировано

0

Wheatstone Bridge MEMS Hydrogen Sensor with ppb-Level Detection Limit Based on the Palladium–Gold Alloy DOI
Ruihao Wang, Xing Zhang, Xiaoqi Feng

и другие.

ACS Sensors, Год журнала: 2024, Номер 9(11), С. 6082 - 6091

Опубликована: Ноя. 5, 2024

On some occasions, such as new energy clinics, monitoring the trace hydrogen at ppb level is necessary. The traditional resistive sensors based on Pd alloys are very difficult to realize an extremely low detection limit. To achieve a limit and also ensure good stability, MEMS sensor was designed in suspended Wheatstone bridge structure, with all four arms defined sputtered Pd-Au alloy thin film. For sensor, absolute response (

Язык: Английский

Процитировано

0