Journal of Materials Science Materials in Electronics, Год журнала: 2024, Номер 35(36)
Опубликована: Дек. 1, 2024
Язык: Английский
Journal of Materials Science Materials in Electronics, Год журнала: 2024, Номер 35(36)
Опубликована: Дек. 1, 2024
Язык: Английский
Applied Surface Science, Год журнала: 2024, Номер unknown, С. 161579 - 161579
Опубликована: Окт. 1, 2024
Язык: Английский
Процитировано
4Optical Materials, Год журнала: 2025, Номер unknown, С. 116861 - 116861
Опубликована: Фев. 1, 2025
Язык: Английский
Процитировано
0Materials, Год журнала: 2025, Номер 18(11), С. 2630 - 2630
Опубликована: Июнь 4, 2025
Gallium oxide (Ga2O3), as an ultra-wide bandgap semiconducting material, has attracted extensive research interest in recent years. Owing to its outstanding electrical and optical properties, well high reliability, Ga2O3 shows great potential power electronics, optoelectronics, memory devices, so on. Among all the different polymorphs, ε-Ga2O3 is second most thermally stable phase. It a hexagonal crystal structure, which contributes isotropic physical properties suitable growth on low-cost commercial substrates, such Al2O3, Si (111). However, there are far fewer works comparison with β Aiming provide comprehensive view current of support future research, this review conducts detailed summarizations for fabrication processes thin films photoelectrical ε-Ga2O3-based photodetectors. The effects deposition parameters film phases qualities discussed. forming mechanisms ε phase prepared by chemical vapor depositions (CVDs) (PVDs) analyzed, respectively. Conclusions made concerning relationships between microstructures properties. In addition, strategies further improving performance briefly summarized.
Язык: Английский
Процитировано
0Journal of Materials Science Materials in Electronics, Год журнала: 2024, Номер 35(36)
Опубликована: Дек. 1, 2024
Язык: Английский
Процитировано
0