Graphene MEMS and NEMS

Microsystems & Nanoengineering, Год журнала: 2024, Номер 10(1)

Опубликована: Окт. 28, 2024

Abstract Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, mechanical strength, piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, new functionalities. In this review, we discuss the merits of a functional material for MEMS related properties graphene, transduction mechanisms typical transfer methods integrating with substrates, fabricating suspended patterning electrical contact. Consequently, provide overview nonsuspended structures. Finally, potential challenges applications NEMS. Owing unique features, promising emerging MEMS, sensor applications.

Язык: Английский

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Fully printed all-resistive dual-mode sensor with ultra-low temperature coefficient of resistance for crosstalk-free detections of pressure and humidity

Chemical Engineering Journal, Год журнала: 2025, Номер 505, С. 159394 - 159394

Опубликована: Янв. 9, 2025

Язык: Английский

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Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits

ACS Nano, Год журнала: 2025, Номер unknown

Опубликована: Фев. 12, 2025

Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, excellent candidates suspended membranes to provide high sensitivity, small footprint sensors. The present work demonstrates pressure employing large-scale-synthesized 2D platinum diselenide (PtSe2) films as piezoresistive supported only by a thin polymer layer. We investigate three different synthesis methods contrasting growth parameters and establish reliable yield fabrication process PtSe2/PMMA across sealed cavities. reproducibly display sensitivities above 6 × 10–4 kPa–1. show that the sensitivity clearly depends on membrane diameter gauge factor of PtSe2 film. Reducing total device size decreasing number within leads significant increase in area-normalized sensitivity. This allows manufacturing but much smaller than current state-of-the-art MEMS technology. further integrate CMOS technology, improving technological readiness PtSe2-based NEMS devices.

Язык: Английский

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Suspended graphene-based NEMS accelerometers with direct electrical readout

Research Square (Research Square), Год журнала: 2025, Номер unknown

Опубликована: Фев. 17, 2025

Atomically thin suspended graphene can be used as NEMS transducers for ultra-small and high-performance sensors due to its excellent mechanical electrical properties. Most applications of in devices are limited pressure sensors, resonators, switches, etc. Graphene-based accelerometers have rarely been reported, with limitations such robustness, life span device yield, thereby limiting their practical applications. Here, we reported piezoresistive graphene-based high manufacturing robustness stability, long span, which the width trenches suspending membranes was only 1 µm fully-clamped double-layer an attached SiO₂/Si proof mass acceleration transducer. The impact geometrical sizes on output signal has studied. These findings would contribute rapid developments related devices.

Язык: Английский

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Enabling Tactile Internet via 6G: Application Characteristics, Requirements, and Design Considerations Top of Form

Future Internet, Год журнала: 2025, Номер 17(3), С. 122 - 122

Опубликована: Март 11, 2025

With the emergence of artificial intelligence and advancements in network technologies, imminent arrival 6G is not very far away. The technology will introduce unique innovative applications Tactile Internet near future. This paper highlights evolution towards enabled by technology, along with details capabilities. It emphasizes stringent requirements for emerging critical role parameters, such as latency, reliability, data rate, others. study identifies important characteristics future applications, interprets them into explicit requirements, then discusses associated design considerations. focuses on application various like virtual reality/augmented reality, remote surgery, gaming, smart cities, autonomous vehicles, industrial automation, brain–machine interface, telepresence/holography, Internet. Furthermore, we discuss exclusive parameters other to realize real-time haptic interactions help intelligence. deliberates examines performance given applications. also types sensors that are required

Язык: Английский

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Two Layers of Carbon Atoms Enable Ultrasensitive Detection of Acceleration

ACS Nano, Год журнала: 2025, Номер unknown

Опубликована: Март 24, 2025

Graphene is a promising material in nanoelectromechanical systems and sensors. Here, we applied suspended two layers of carbon atoms with an attached SiO2/Si proof mass that more than 30000 times heavier the springs made for sensing acceleration found enhanced electromechanical coupling transduction. As result, devices based on have at least 3 orders magnitude higher sensitivity per volume smaller state-of-the-art silicon piezoresistive accelerometers. These findings demonstrate atomically thin potential to realize ultrasmall ultrasensitive are highly demanded many emerging applications such as biomedical implantable systems, medical micro/nanorobots precision medicine, wearable devices.

Язык: Английский

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Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors

ACS Applied Materials & Interfaces, Год журнала: 2024, Номер 16(43), С. 59066 - 59076

Опубликована: Окт. 19, 2024

Graphene-based two-dimensional (2D) heterostructures exhibit excellent mechanical and electrical properties, which are expected to better performances than graphene for nanoelectromechanical pressure sensors. Here, we built sensor models based on suspended of graphene/h-BN, graphene/MoS2, graphene/MoSe2 by using COMSOL Multiphysics finite element software. We found that circular 2D membranes show the best sensitivity pressures compared rectangular square ones. simulated deflections, strains, resonant frequencies, Young's moduli graphene-based under conditions different applied geometrical sizes, built-in tensions, number atomic layers membranes. The graphene, were estimated be 1.001 TPa, 921.08, 551.11, 475.68 GPa, respectively. also discuss effect highly asymmetric cavities device performance. These results would contribute understanding properties helpful design manufacture high-performance NEMS

Язык: Английский

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Four ribbons of double-layer graphene suspending masses for NEMS applications

Microsystems & Nanoengineering, Год журнала: 2024, Номер 10(1)

Опубликована: Окт. 21, 2024

Язык: Английский

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