3D shape reconstruction from focus and enhanced focus volume
Measurement,
Год журнала:
2025,
Номер
245, С. 116668 - 116668
Опубликована: Янв. 5, 2025
Язык: Английский
A multi-field shape-from-focus recovery framework for applications involving small scales
Optics & Laser Technology,
Год журнала:
2025,
Номер
184, С. 112563 - 112563
Опубликована: Фев. 1, 2025
Язык: Английский
A novel algorithm for three-dimensional shape reconstruction for microscopic objects based on shape from focus
Optics & Laser Technology,
Год журнала:
2023,
Номер
168, С. 109931 - 109931
Опубликована: Авг. 12, 2023
Язык: Английский
Wafer Surface Reconstruction Based on Shape From Focus
IEEE Access,
Год журнала:
2024,
Номер
12, С. 25684 - 25699
Опубликована: Янв. 1, 2024
Scanning
electron
microscope,
atomic
force
microscope
and
other
equipment
play
an
important
role
in
the
fields
of
topography
restoration
detection.
However,
these
devices
are
generally
used
nanometer-scale
measurement
scenarios.
For
wafer
quality
control
scenarios
ranging
from
microns
to
hundreds
microns,
technologies
have
problems
such
as
high
cost
slow
detection
speed.
Therefore,
developing
new,
low-cost,
high-precision
methods
is
necessary.
To
address
this
problem,
a
surface
reconstruction
framework
proposed
based
on
shape-from-focus
principle.
In
view
characteristics
large
area
micro-small
height
wafer,
solve
limitations
existing
shape
focus
framework,
which
single
field,
we
created
multi-field
image
sequence
rapid
acquisition
system
use
pulse
achieve
images.
On
hand,
paper
proposes
dual
filtering
combining
Levy
flight
principle
with
SOR
algorithm
point
cloud
balance
between
smoothing
depth
map
maintaining
detailed
structure,
reducing
impact
noise,
improving
morphology
accuracy.
avoid
splicing
seams
fields,
progressive
multifield
stitching
technique
complete
large-area
data
stitching.
Experiments
were
conducted
both
synthetic
real
objects
verify
effectiveness
method.
terms
synthesized
images,
accuracy
three
significantly
improved
after
applying
method
framework.
After
Tenenbaum
its
correlation
peak
signal-to-noise
ratio
by
7.5%
38.2%,
respectively,
root
mean
square
error
was
reduced
40.7%.
The
excellent
results
verified
through
evaluation
experiments.
errors
all
higher
than
1
μm.
using
maximum
only
0.24
experimental
indicated
that
overcomes
limitation
traditional
SFF
suitable
for
measurements.
Язык: Английский
Phase-based reconstruction optimization method for digital holographic measurement of microstructures
Applied Optics,
Год журнала:
2023,
Номер
62(17), С. 4530 - 4530
Опубликована: Май 15, 2023
Digital
holography
has
transformative
potential
in
measuring
stacked-chip
microstructures
due
to
its
noninvasive,
single-shot,
full-field
characteristics.
However,
uncertainties
reconstruction
distance
inevitably
lead
resolving
blur
and
distortion.
Herein,
we
propose
a
phase-based
optimization
method
that
consists
of
phase-evaluation
function
structured
surface-characterization
model.
Our
proposed
involves
setting
range,
obtaining
phase
information
using
sliced
numerical
reconstruction,
optimizing
the
by
finding
extreme
value
function,
which
identifies
focal
plane
reconstructed
image.
The
structure
surface
topography
is
then
characterized
characterization
We
perform
simulations
recording,
verify
effectiveness
method.
To
further
demonstrate
approach,
simple
holographic
recording
system
constructed
measure
standard
resolution
target,
measurement
results
are
compared
with
commercial
instrument.
simulation
experiment
demonstrate,
respectively,
31.16%
34.41%
improvement
step-height
accuracy.
Язык: Английский