E3S Web of Conferences, Год журнала: 2024, Номер 529, С. 04013 - 04013

Опубликована: Янв. 1, 2024

The integration of Micro-Electro-Mechanical Systems (MEMS) into structural control strategies represents a transformative step towards more efficient, precise, and resilient engineering applications. This paper reviews the evolution current state MEMS technology in context control, highlighting key fabrication techniques such as wet dry etching, sacrificial layer technology, advanced additive manufacturing (AM). We delve unique properties advantages brought by various domains, including drug delivery systems, industrial automation, tissue engineering. Special attention is given to comparison traditional modern methods, examining their impact on device performance, cost-efficiency, application breadth. emerging synergy between nanotechnology, particularly enhancing sensor capabilities fostering new biomedical environmental applications, also explored. Through detailed analysis, this underscores significant role advancing mechanisms outlines future directions for research application.

Язык: Английский