Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry–Pérot filter DOI Creative Commons
Pratyasha Sahani,

Shiori Nabana,

Taiyu Okatani

и другие.

AIP Advances, Год журнала: 2024, Номер 14(7)

Опубликована: Июль 1, 2024

We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with static gradient thickness on same platform. The proposed double configuration offers wavelength calibration approach that accurately estimates dimension in FPF. is performed by utilizing spectrally-selective and spatially-resolved transmission characteristics of FPF filter, respectively. MEMS-compatible chip-level integration facilitates miniaturization to enable its use handheld devices.

Язык: Английский

Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry–Pérot filter DOI Creative Commons
Pratyasha Sahani,

Shiori Nabana,

Taiyu Okatani

и другие.

AIP Advances, Год журнала: 2024, Номер 14(7)

Опубликована: Июль 1, 2024

We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with static gradient thickness on same platform. The proposed double configuration offers wavelength calibration approach that accurately estimates dimension in FPF. is performed by utilizing spectrally-selective and spatially-resolved transmission characteristics of FPF filter, respectively. MEMS-compatible chip-level integration facilitates miniaturization to enable its use handheld devices.

Язык: Английский

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