Redeposition-free inductively-coupled plasma etching of lithium niobate for integrated photonics

Nanophotonics, Год журнала: 2023, Номер 12(8), С. 1601 - 1611

Опубликована: Янв. 14, 2023

Abstract Lithium niobate on insulator is being established as a versatile platform for new generation of photonic integrated devices. Extensive progress has been made in recent years to improve the fabrication optical circuits from research towards wafer-scale commercial foundries, and losses have reached remarkably low values approaching material limits. In this context, argon etching lithium waveguides shown provide best quality, yet process still challenging optimise due its physical nature. Namely, micro-masking effects introduced by redeposition close one etch mask selectivity deep etches. We present workflow identify parameter set offering results independent plasma system used. show how reach redeposition-free regime propose three methods achieve with good quality sidewalls without need wet chemistry cleaning.

Язык: Английский

---

A Survey on Optical Phase-Change Memory: The Promise and Challenges

IEEE Access, Год журнала: 2023, Номер 11, С. 11781 - 11803

Опубликована: Янв. 1, 2023

Silicon photonics (SiPh) technology has facilitated the deployment of integrated across different application domains, from ultra-fast communication in Datacom applications to energy-efficient optical computation emerging hardware accelerators for machine learning. More recently, integration SiPh and phase change materials created a unique opportunity realize adaptable, reconfigurable, programmable photonic platforms. In particular, nonvolatile programmability made them promising candidate implementing memory cells architectures. Accordingly, systems even in-memory computing paradigms are on rise, especially given their potential improving data access electronic processors. However, there still many challenges design fabrication phase-change circuits, which need be addressed. This article presents comprehensive survey recent advances with contemporary devices while focusing application. we explore material level architecture by presenting an overview material-level characteristics optical, electrical, thermal properties as well into architectures computing. We also present comparison discuss open research that must addressed further advance towards successful systems.

Язык: Английский

---

Heterogeneous integration of a high-speed lithium niobate modulator on silicon nitride using micro-transfer printing

APL Photonics, Год журнала: 2023, Номер 8(8)

Опубликована: Авг. 1, 2023

Integrated photonic systems require fast modulators to keep up with demanding operation speeds and increasing data rates. The silicon nitride integrated platform is of particular interest for applications such as datacom, light detection ranging (LIDAR), quantum photonics, computing owing its low losses CMOS compatibility. Yet, this inherently lacks high-speed modulators. Heterogeneous integration lithium niobate on waveguides can address drawback strong Pockels effect. We demonstrate the first modulator heterogeneously using micro-transfer printing. device 2 mm long a half-wave voltage Vπ 14.8 V. insertion loss extinction ratio are 3.3 39 dB, respectively. Operation beyond 50 GHz has been demonstrated generation open eye diagrams 70 Gb/s. This proof-of-principle demonstration opens possibilities more scalable fabrication these trusted performant devices.

Язык: Английский

---

Full-spectrum visible electro-optic modulator

Optica, Год журнала: 2023, Номер 10(1), С. 125 - 125

Опубликована: Янв. 4, 2023

We report an on-chip high-speed visible-band electro-optic modulator that can operate over the full visible spectrum of 400–700 nm, with a record low V π ⋅ L 0.48, 0.25, and 0.17 V mathvariant="normal">c mathvariant="normal">m at red, green, blue wavelengths 630, 520, 450 respectively, operation bandwidth > 20 mathvariant="normal">G mathvariant="normal">H mathvariant="normal">z .

Язык: Английский

---

Frequency comb generation via synchronous pumped χ(3) resonator on thin-film lithium niobate

Nature Communications, Год журнала: 2024, Номер 15(1)

Опубликована: Май 9, 2024

Abstract Resonator-based optical frequency comb generation is an enabling technology for a myriad of applications ranging from communications to precision spectroscopy. These combs can be generated in nonlinear resonators driven using either continuous-wave (CW) light, which requires alignment the pump with cavity resonance, or pulsed also mandates that pulse repetition rate and free spectral range (FSR) are carefully matched. Advancements nanophotonics have ignited interest chip-scale combs. However, realizing pulse-driven on-chip Kerr remains challenging, as microresonator cavities limited tuning their FSR resonance frequency. Here, we take steps overcome this limitation demonstrate broadband χ (3) resonator synchronously pumped by tunable femtosecond generator amplitude phase modulators. Notably, employing pumping overcomes limitations typically seen crystalline stimulated Raman scattering.

Язык: Английский

---