Applied Surface Science, Год журнала: 2025, Номер 704, С. 163448 - 163448
Опубликована: Май 6, 2025
Язык: Английский
Applied Surface Science, Год журнала: 2025, Номер 704, С. 163448 - 163448
Опубликована: Май 6, 2025
Язык: Английский
Electronics, Год журнала: 2025, Номер 14(3), С. 595 - 595
Опубликована: Фев. 2, 2025
In the modern world, gas sensors play a crucial role in sectors such as high-tech industries, medicine, and environmental monitoring. Among these fields, oxygen are most important. There several types of sensors, including optical, magnetic, Schottky diode, resistive (or chemoresistive) ones. Currently, oxygen-resistive (ORSs) described literature fabricated thick layers, typically deposited via screen printing, they operate at high temperatures, often exceeding 700 °C. This work presents novel approach utilizing atomic layer deposition (ALD) to create very thin layers. Combined with appropriate doping, this method aims reduce energy consumption by lowering both mass requiring heating operating temperature. The device using proposed process demonstrates response 88.21 relatively low temperature 450 °C, highlighting its potential ORS applications based on doped ALD films.
Язык: Английский
Процитировано
1ACS Applied Nano Materials, Год журнала: 2025, Номер unknown
Опубликована: Апрель 8, 2025
Язык: Английский
Процитировано
1Applied Surface Science, Год журнала: 2025, Номер 687, С. 162304 - 162304
Опубликована: Янв. 5, 2025
Язык: Английский
Процитировано
0Applied Surface Science, Год журнала: 2025, Номер 704, С. 163448 - 163448
Опубликована: Май 6, 2025
Язык: Английский
Процитировано
0