Applied Surface Science, Journal Year: 2025, Volume and Issue: 704, P. 163448 - 163448
Published: May 6, 2025
Language: Английский
Applied Surface Science, Journal Year: 2025, Volume and Issue: 704, P. 163448 - 163448
Published: May 6, 2025
Language: Английский
Electronics, Journal Year: 2025, Volume and Issue: 14(3), P. 595 - 595
Published: Feb. 2, 2025
In the modern world, gas sensors play a crucial role in sectors such as high-tech industries, medicine, and environmental monitoring. Among these fields, oxygen are most important. There several types of sensors, including optical, magnetic, Schottky diode, resistive (or chemoresistive) ones. Currently, oxygen-resistive (ORSs) described literature fabricated thick layers, typically deposited via screen printing, they operate at high temperatures, often exceeding 700 °C. This work presents novel approach utilizing atomic layer deposition (ALD) to create very thin layers. Combined with appropriate doping, this method aims reduce energy consumption by lowering both mass requiring heating operating temperature. The device using proposed process demonstrates response 88.21 relatively low temperature 450 °C, highlighting its potential ORS applications based on doped ALD films.
Language: Английский
Citations
1Applied Surface Science, Journal Year: 2025, Volume and Issue: 687, P. 162304 - 162304
Published: Jan. 5, 2025
Language: Английский
Citations
0ACS Applied Nano Materials, Journal Year: 2025, Volume and Issue: unknown
Published: April 8, 2025
Language: Английский
Citations
0Applied Surface Science, Journal Year: 2025, Volume and Issue: 704, P. 163448 - 163448
Published: May 6, 2025
Language: Английский
Citations
0