Micromachines, Год журнала: 2024, Номер 15(10), С. 1244 - 1244

Опубликована: Окт. 9, 2024

A comprehensive review of the application different ceramics for MEMS devices is presented. Main materials used systems and including alumina, zirconia, aluminum Nitride, Silicon LTCC are introduced. Conventional new methods fabricating each material explained based on literature, along with advantages approaches, mainly additive manufacturing, i.e., 3D-printing technologies. Various manufacturing processes relevant sub-techniques detailed ones that more suitable to have an highlighted their properties. In main body this paper, its categorized explained. The majority works within three classifications, following: (i) using as a substrate be mounted or fabricated top it; (ii) part device monolithic fabrication ceramics; finally, (iii) packaging solution devices. We elaborate how may superior substitutes over other when delicate MEMS-based need assembled packaged by simpler process well they operate in harsh environments.

Язык: Английский