Large depth-of-field microscopic structured-light 3D imaging with focus stacking
Optics and Lasers in Engineering,
Год журнала:
2023,
Номер
167, С. 107623 - 107623
Опубликована: Апрель 25, 2023
Язык: Английский
High efficiency and high precision measurement method for the volume of weights using computer vision
Measurement,
Год журнала:
2025,
Номер
unknown, С. 117353 - 117353
Опубликована: Март 1, 2025
Язык: Английский
Single-pixel imaging-based PSF compensation for large depth-of-field fringe projection profilometry
Measurement,
Год журнала:
2024,
Номер
235, С. 114954 - 114954
Опубликована: Май 22, 2024
Язык: Английский
Motionless shape-from-focus depth measurement via high-speed axial optical scanning
Optics Communications,
Год журнала:
2023,
Номер
546, С. 129756 - 129756
Опубликована: Июль 15, 2023
Язык: Английский
Novel chromatic focus variation microscopy for surface metrology
Optics Express,
Год журнала:
2024,
Номер
32(20), С. 35527 - 35527
Опубликована: Авг. 27, 2024
Optical
metrology
plays
a
vital
role
in
wide
range
of
research
and
inspection
areas
the
industry.
At
present,
market
offers
variety
optical
instruments,
among
which
focus
variation
microscope
stands
out
for
its
capability
measuring
steep
surfaces
with
high
slopes.
The
traditional
(FV)
instrument
mechanically
scans
surface
by
sweeping
focal
plane
objective
lens
using
linear
motion
stages
simultaneously
capturing
images
at
different
scanning
positions,
forming
stack
images.
mechanical
require
regular
maintenance
calibration
to
ensure
accuracy
over
time.
Another
issue
associated
methods
is
their
physical
size,
creates
limiting
factor
compactness
in-situ
measurement
applications.
This
work
proposes
chromatic
(CFV)
method
that
replaces
wavelength
mechanism
overcome
above
limitations.
Unlike
variation,
CFV
system
employs
dispersive
(i.e.
chromatically
aberrated
lens)
axially
shift
along
axis
provide
vertical/depth
scanning.
approach
brings
significant
enhancements
speed
reduces
size
on-machine
tasks.
In
this
paper,
detailed
analysis
performance
conducted,
then
proposed
validated
samples
including
step
height
30
µm
sine
wave
shape
peak-to-valley
amplitude
19
µm.
experiment
results
were
compared
those
from
state-of-the-art
commercial
(Alicona
G5),
showed
good
agreement
between
two.
Furthermore,
discussions
are
provided
investigate
measurement’s
accuracy.
Язык: Английский
Areal surface measurement using chromatic focus variation
Опубликована: Окт. 20, 2023
Optical
metrology
is
an
essential
measurement
technology
across
various
research
and
inspection
domains.
Focus
variation
instruments
are
widely
used
in
the
industry
due
to
their
ability
measure
steep
high-slope
surfaces.
The
focus
method
extracts
areal
surface
map
by
analysing
neighbouring
pixels'
contrast
determine
image
position
a
stack
of
images.
Traditional
mechanically
scan
sample
attaching
objective
lens
piezoelectric
actuator
(PZT)
for
capture.
slow
mechanical
movement
PZT
poses
limitation
fast
modern
advanced
manufacturing
applications.
Additionally,
PZTs'
bulky
mass
size,
nonlinear
hysteresis
motion
other
issues
associated
with
scanning
process.
To
address
these
limitations,
we
present
chromatic
approach
that
replaces
wavelength
mechanism.
system
employs
determines
axially
shifting
light
source
without
any
movement.
This
paper
presents
30
µm
step
height
using
proposed
system.
results
show
capable
measurements,
but
current
version
has
low
vertical
resolution,
which
should
be
enhanced
future
versions.
Язык: Английский