Areal surface measurement using chromatic focus variation DOI

Aalim M. Mustafa,

Hussam Muhamedsalih, Dawei Tang

et al.

Published: Oct. 20, 2023

Optical metrology is an essential measurement technology across various research and inspection domains. Focus variation instruments are widely used in the industry due to their ability measure steep high-slope surfaces. The focus method extracts areal surface map by analysing neighbouring pixels' contrast determine image position a stack of images. Traditional mechanically scan sample attaching objective lens piezoelectric actuator (PZT) for capture. slow mechanical movement PZT poses limitation fast modern advanced manufacturing applications. Additionally, PZTs' bulky mass size, nonlinear hysteresis motion other issues associated with scanning process. To address these limitations, we present chromatic approach that replaces wavelength mechanism. system employs determines axially shifting light source without any movement. This paper presents 30 µm step height using proposed system. results show capable measurements, but current version has low vertical resolution, which should be enhanced future versions.

Language: Английский

Large depth-of-field microscopic structured-light 3D imaging with focus stacking DOI Creative Commons
Liming Chen, Song Zhang

Optics and Lasers in Engineering, Journal Year: 2023, Volume and Issue: 167, P. 107623 - 107623

Published: April 25, 2023

Language: Английский

Citations

11
High efficiency and high precision measurement method for the volume of weights using computer vision DOI
Yunlong Liu, Haoyu Zhang, Yang Li

et al.

Measurement, Journal Year: 2025, Volume and Issue: unknown, P. 117353 - 117353

Published: March 1, 2025

Language: Английский

Citations

0
Motionless shape-from-focus depth measurement via high-speed axial optical scanning DOI
Zilong Li,

Jiaqing Dong,

Wenhua Zhong

et al.

Optics Communications, Journal Year: 2023, Volume and Issue: 546, P. 129756 - 129756

Published: July 15, 2023

Language: Английский

Citations

5
Single-pixel imaging-based PSF compensation for large depth-of-field fringe projection profilometry DOI

Nenqing Lyu,

Dongliang Zheng, Lianfa Bai

et al.

Measurement, Journal Year: 2024, Volume and Issue: 235, P. 114954 - 114954

Published: May 22, 2024

Language: Английский

Citations

1
Novel chromatic focus variation microscopy for surface metrology DOI Creative Commons

Aalim M. Mustafa,

Hussam Muhamedsalih, Dawei Tang

et al.

Optics Express, Journal Year: 2024, Volume and Issue: 32(20), P. 35527 - 35527

Published: Aug. 27, 2024

Optical metrology plays a vital role in wide range of research and inspection areas the industry. At present, market offers variety optical instruments, among which focus variation microscope stands out for its capability measuring steep surfaces with high slopes. The traditional (FV) instrument mechanically scans surface by sweeping focal plane objective lens using linear motion stages simultaneously capturing images at different scanning positions, forming stack images. mechanical require regular maintenance calibration to ensure accuracy over time. Another issue associated methods is their physical size, creates limiting factor compactness in-situ measurement applications. This work proposes chromatic (CFV) method that replaces wavelength mechanism overcome above limitations. Unlike variation, CFV system employs dispersive (i.e. chromatically aberrated lens) axially shift along axis provide vertical/depth scanning. approach brings significant enhancements speed reduces size on-machine tasks. In this paper, detailed analysis performance conducted, then proposed validated samples including step height 30 µm sine wave shape peak-to-valley amplitude 19 µm. experiment results were compared those from state-of-the-art commercial (Alicona G5), showed good agreement between two. Furthermore, discussions are provided investigate measurement’s accuracy.

Language: Английский

Citations

0
Areal surface measurement using chromatic focus variation DOI

Aalim M. Mustafa,

Hussam Muhamedsalih, Dawei Tang

et al.

Published: Oct. 20, 2023

Optical metrology is an essential measurement technology across various research and inspection domains. Focus variation instruments are widely used in the industry due to their ability measure steep high-slope surfaces. The focus method extracts areal surface map by analysing neighbouring pixels' contrast determine image position a stack of images. Traditional mechanically scan sample attaching objective lens piezoelectric actuator (PZT) for capture. slow mechanical movement PZT poses limitation fast modern advanced manufacturing applications. Additionally, PZTs' bulky mass size, nonlinear hysteresis motion other issues associated with scanning process. To address these limitations, we present chromatic approach that replaces wavelength mechanism. system employs determines axially shifting light source without any movement. This paper presents 30 µm step height using proposed system. results show capable measurements, but current version has low vertical resolution, which should be enhanced future versions.

Language: Английский

Citations

0