Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena,
Journal Year:
2025,
Volume and Issue:
43(3)
Published: March 24, 2025
Due
to
the
increased
power
consumption
of
advanced
integrated
circuits
(IC)
having
billions
interconnected
devices,
ever
more
demanding
energy
requirements
are
needed
for
these
chips
with
every
technology
node.
This
is
especially
important
in
era
artificial
intelligence,
Internet
Things
(IoT),
communication
networks
like
5G/6G,
and
others,
whose
applications
depend
on
access
reliable
supplies.
Therefore,
supplementary
alternatives
able
energize
and/or
protect
critical
functions
IC
required.
Here,
we
present
some
advances
development
ZrO2:Y2O3-based
solid
electrolytes
(obtained
by
atomic
layer
deposition)
that,
along
right
metallic
electrodes
interfaces,
can
result
solid-state
batteries
(SSB)
provide
a
fraction
required
operate
simple
devices
circuits.
By
integrating
SSB
same
chip,
could
be
kept
running
without
severely
compromising
size
area,
all
while
within
latest
stages
back-end
line
process.
Finally,
benchmarking
ALD-YSZ-based
shows
that
their
performance
compares
or
exceeds
Li-ion-based
electrolytes.
Deleted Journal,
Journal Year:
2022,
Volume and Issue:
1, P. e9120018 - e9120018
Published: June 21, 2022
Ultracompact
and
customizable
micro-supercapacitors
(MSCs)
are
highly
demanded
for
powering
microscale
electronics
of
5G
Internet
Things
technologies.
So
far,
tremendous
efforts
have
been
concentrated
on
fabricating
high-performance
MSCs;
however,
compatible
fabrication
monolithic
integration
MSCs
with
microelectronic
systems
still
remains
a
huge
challenge
taking
into
full
consideration
the
factors
such
as
electrode
film
fabrication,
high-resolution
microelectrode
pattern,
electrolyte
precise
deposition.
In
this
review,
we
summarize
recent
advances
ultrasmall
integrated
tunable
performance
function,
including
key
microfabrication
technologies
patterning
microelectrodes
superior
resolution,
deposition
customized
electrolytes
in
an
extremely
small
space,
feasible
strategies
improving
electrochemical
by
constructing
thick
special
structure.
Finally,
related
challenges
prospects
ultracompact
MSCs,
methods
materials
films,
microelectrodes,
customizing
shape-conformable
electrolytes,
optimization,
efficient
systems,
put
forward
further
promoting
their
practical
application.
Nano-Micro Letters,
Journal Year:
2023,
Volume and Issue:
15(1)
Published: May 20, 2023
Abstract
Rechargeable
aqueous
zinc
iodine
(ZnǀǀI
2
)
batteries
have
been
promising
energy
storage
technologies
due
to
low-cost
position
and
constitutional
safety
of
anode,
cathode
electrolytes.
Whereas,
on
one
hand,
the
low-fraction
utilization
electrochemically
inert
host
causes
severe
shuttle
soluble
polyiodides,
deficient
sluggish
reaction
kinetics.
On
other
usage
high
mass
polar
electrocatalysts
occupies
volume
electrode
materials
sacrifices
device-level
density.
Here,
we
propose
a
“confinement-catalysis”
composed
Fe
single
atom
catalyst
embedding
inside
ordered
mesoporous
carbon
host,
which
can
effectively
confine
catalytically
convert
I
/I
−
couple
polyiodide
intermediates.
Consequently,
enables
capacity
188.2
mAh
g
−1
at
0.3
A
,
excellent
rate
capability
with
139.6
delivered
current
density
15
ultra-long
cyclic
stability
over
50,000
cycles
80.5%
initial
retained
under
loading
76.72
wt%.
Furthermore,
electrocatalytic
also
accelerate
$$\text{I}^{+}\leftrightarrow\,
\text{I}_{2}
$$
I+↔2
conversion.
The
greatly
improved
electrochemical
performance
originates
from
modulation
physicochemical
confinement
decrease
barrier
for
reversible
+
couples,
intermediates
conversions.
Cyborg and Bionic Systems,
Journal Year:
2023,
Volume and Issue:
4
Published: Jan. 1, 2023
Biomachine
hybrid
robots
have
been
proposed
for
important
scenarios,
such
as
wilderness
rescue,
ecological
monitoring,
and
hazardous
area
surveying.
The
energy
supply
unit
used
to
power
the
control
backpack
carried
by
these
determines
their
future
development
practical
application.
Current
devices
backpacks
are
mainly
chemical
batteries.
To
achieve
self-powered
devices,
researchers
developed
solar
energy,
bioenergy,
biothermal
biovibration
harvesters.
This
review
provides
an
overview
of
research
in
batteries
biomachine
robots.
Various
different
biocarriers
entry
points
design
outlined
detail.
Finally,
challenges
possible
directions
is
provided.
Advanced Energy Materials,
Journal Year:
2024,
Volume and Issue:
14(12)
Published: Feb. 14, 2024
Abstract
Micro
energy
sources
as
the
nucleus
of
intelligent
microdevices
guarantee
their
full
autonomy
in
dimensions
time
and
space.
However,
state‐of‐the‐art
micro
storage
components,
like
all‐solid‐state
thin‐film
microbatteries
(ASSTFBs),
whose
direct
integration
is
impeded
by
stereotyped
vacuum‐based
manufacturing
technologies,
for
which
an
inevitable
high‐temperature
annealing
step
(>
500
°C)
can
exert
catastrophic
effects
on
attached
during
crystallization
manufactured
insertion
cathodes,
especially
flexible
integration.
Herein,
a
prototype
construction
created
to
benchmark
concrete
feasibility
low‐temperature
ASSTFBs
via
nonvacuum‐based
spin‐coating
electrode
architecture.
Results
show
that
spin‐coated
LiFePO
4
films
enable
(≈
45
ASSTFBs,
it
deliver
excellent
cycling
performance
up
1000
cycles.
Importantly,
this
technology
presents
versatility
integrating
various
cathode
composites
into
therefore
generalized
LiCoO
2
‐
Li
Ti
5
O
12
‐based
solid‐state
chemistries.
Furthermore,
with
such
compliant
electrodes
manifest
outstanding
flexibility
without
pronounced
capacity
degradation
successfully
temperature‐sensitive
substrates.
The
protocol
provides
general
solution
excessive
processing
temperatures
ample
opportunities
development
on‐chip
integratable
ASSTFBs.
Carbon Energy,
Journal Year:
2022,
Volume and Issue:
5(1)
Published: Nov. 8, 2022
Abstract
One
of
the
most
exciting
new
developments
in
energy
storage
technology
is
flexible
Zn‐ion
hybrid
supercapacitors
(f‐ZIHSCs),
which
combine
high
batteries
with
high‐power
to
satisfy
needs
portable
electronics.
However,
development
f‐ZHSCs
still
its
infancy,
and
there
are
numerous
barriers
overcome
before
they
can
be
widely
implemented
for
practical
applications.
This
review
gives
an
up‐to‐date
description
recent
achievements
underlying
concepts
mechanisms
f‐ZIHSCs
emphasizes
critical
role
cathode,
anode,
electrolyte
materials
systems
speeding
prosperity
f‐ZIHSCs.
The
innovative
nanostructured‐based
cathode
include
carbon
(e.g.,
porous
carbon,
heteroatom‐doped
biomass‐derived
graphene,
etc.),
metal‐oxides,
MXenes,
metal/covalent‐organic
frameworks,
other
activated
phosphorene,
etc.)
mainly
focused.
Afterward,
latest
anode
frameworks
impacts
compositions
on
electrochemical
properties
f‐ZIHSC
elaborated.
Subsequently,
advancements
based
fabrication
designs,
including
quasi‐solid‐state,
micro,
fiber‐shaped,
all
climate‐changed
f‐ZIHSCs,
discussed
detail.
Lastly,
a
summary
current
challenges
recommendations
future
progress
advanced
addressed.
article
anticipated
further
understand
viable
strategies
achievable
approaches
assembling
high‐performance
boost
technical
revolutions
electrolytes
devices.
Advanced Energy Materials,
Journal Year:
2022,
Volume and Issue:
12(28)
Published: June 11, 2022
Abstract
As
substantial
progress
has
been
made
to
miniaturize
intelligent
microsystems
the
sub‐square‐millimeter
scale,
there
is
a
desperate
need
move
beyond
existing
microbattery
technologies
offer
adequate
energy
at
same
footprint.
A
micro‐origami
technology
able
wind
up
flat
layer
stack
into
Swiss
roll
presents
promising
approach
in
this
regard
because
it
mimics
most
successful
way
make
energy‐dense
full‐sized
batteries.
Here,
an
on‐chip
Swiss‐roll
current
collector
via
process
developed
and
infused
with
MnO
2
slurry
comprising
zincophilic
binder.
The
binder
enhances
zinc
ion
transportability
suppresses
dissolution.
microelectrode
used
create
small
electrode
footprint
area
of
0.75
mm
,
which
shows
capacity
3.3
mAh
cm
–2
.
demonstrates
reversible
more
than
1
for
150
cycles.
battery
stability
can
be
improved
over
600
cycles
50%
depth
discharge.
An
integration
microsystem
demonstrated.
microbatteries
set
foot
untrodden
providing
ever
miniaturized
microsystems.
Advanced Functional Materials,
Journal Year:
2023,
Volume and Issue:
34(7)
Published: Nov. 1, 2023
Abstract
Printed
zinc
ion
micro‐batteries
(PZIMBs)
possess
characteristics
such
as
miniaturization,
customizability,
and
affordability,
making
them
highly
promising
for
the
field
of
flexible
electronic
devices.
Nevertheless,
current
development
PZIMBs
is
seriously
hindered
by
their
limited
areal
capacity.
In
this
study,
with
a
high
capacity
are
conducted
based
on
3D
printing
technology
optimizing
material
properties,
electrode
ink
formulation,
parameters.
The
cathode
material,
polyvinylpyrrolidone‐induced
ammonium
vanadate
(P‐NVO)
nanobelt,
exhibits
457.3
mAh
g
−1
at
0.1
mA
,
along
good
cycling
performance
rate
capability.
double‐network
hydrogel
electrolyte,
composed
crosslinked
polyacrylamide‐polyvinylpyrrolidone
(PAM‐PVP
electrolyte),
demonstrates
excellent
ionic
conductivity
(107.22
mS
cm
),
stretchability
(970%),
viscosity.
constructed
exhibit
4.02
−2
0.5
mechanical
flexibility.
Moreover,
through
integration
pressure
sensors,
an
interactive
system
developed
that
resembles
skin,
enables
practical
applications
wearable
This
study
presents
novel
approach
fabricating
capacity,
thereby
contributing
to
propelling
advancement
energy
storage.