Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process DOI Creative Commons
My Thi Ngoc Nguyen, Jun Seop Lee

Chemosensors, Journal Year: 2024, Volume and Issue: 12(11), P. 233 - 233

Published: Nov. 9, 2024

The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These can be categorized into four groups: acidic and alkaline gases, volatile organic compounds, flammable corrosive greenhouse gases. To meet stricter emission standards, further advancements gas sensor technology essential. This review examines recent research on monitoring these highlighting capabilities limitations of existing technologies. Additionally, paper discusses current challenges sensing proposes future directions for improving

Language: Английский

Metal-organic frameworks based fluorescent sensing: Mechanisms and detection applications DOI
Yuanyuan Cai, Tao Dong,

Zihan Bian

et al.

Coordination Chemistry Reviews, Journal Year: 2025, Volume and Issue: 529, P. 216470 - 216470

Published: Jan. 28, 2025

Language: Английский

Citations

11
Scalable Melt Polymerization Synthesis of Covalent Organic Framework Films for Room Temperature Low-Concentration SO2 Detection DOI

Sa Wang,

Yu Fu, Fengdong Wang

et al.

Journal of the American Chemical Society, Journal Year: 2024, Volume and Issue: unknown

Published: Nov. 27, 2024

The development of highly efficient sensors for low-concentration SO

Language: Английский

Citations

10
Current Advances of CO Sensing Based on Low Dimensional Materials DOI

Yundi Zhang,

Jie Liu, Changru Rong

et al.

Langmuir, Journal Year: 2024, Volume and Issue: 40(36), P. 18821 - 18836

Published: Aug. 28, 2024

Carbon monoxide (CO) is a harmful gas with significant impacts on human health and the environment. Its timely detection, especially in event of thermal runaway automotive lithium batteries, crucial to prevent casualties. This paper reviews progress development efficient, sensitive, reliable CO sensors, focusing electrochemical, optical, resistive sensing materials. Low-dimensional materials have large specific surface area, providing an abundant number active sites, which has drawn extensive attention from researchers. According different sensor signals, we categorized these sensors into electrical optical signal sensors. We hope that by systematically introducing mechanism performance two kinds appropriate can be developed application scenarios so as realize early warning monitoring maximum extent, reduce industrial losses, ensure life personnel.

Language: Английский

Citations

5
Impedance Spectroscopic Analysis of Methane Sensing Characteristics in Electrospun Tungsten Oxide Nanofibers with Particle Size Heterogeneity DOI Creative Commons
Papot Jaroenapibal,

Watchara Sukbua,

Napat Triroj

et al.

ACS Omega, Journal Year: 2025, Volume and Issue: unknown

Published: Jan. 28, 2025

The sensing performance of nanostructured metal-oxide-based gas sensors is highly dependent on their morphology, which directly influences sensitivity and response dynamics. This study investigates the impedance characteristics tungsten oxide (WO3) nanofibers with varying particle sizes, synthesized through electrospinning. By adjusting precursor concentrations calcination temperatures, an average diameter 135 ± 29 nm were produced. These exhibited sizes ranging from to 100 nm, as confirmed by transmission electron microscopy (TEM), crystallite 17 62 determined X-ray diffraction (XRD) analysis. Impedance spectroscopy was employed analyze electronic conduction dynamics, are critical methane (CH4) mechanism. optimal operating temperature found be inversely related size. sensor smallest particles (29 nm) lowest 200 °C, while larger required higher up 275 °C. Nanofibers also demonstrated highest (S = Rair/Rgas) 2.85 when exposed 0.1% (1000 ppm) CH4 at Additionally, smaller associated reduced grain boundary relaxation times, leading faster responses. enhanced fast dynamics attributed morphology-induced catalytic effects, reduce activation energy improve charge carrier mobility boundaries. provides valuable insights into factors governing electrical metal-oxide chemiresistive sensors.

Language: Английский

Citations

0
n/p-Type Doping Modulation of the Adsorption and Selection Behavior of Harmful Gas Molecules on the Surface of SWCNTs for Enhanced Gas-Sensing Performance DOI
Xinxia Li, Xinyuan Tang, Zihan Wang

et al.

ACS Sensors, Journal Year: 2025, Volume and Issue: unknown

Published: March 24, 2025

Single-walled carbon nanotubes (SWCNTs) are a promising candidate material for detecting harmful gases due to their unique advanced character, but gas-sensing properties still need be improved. With the aim of exploring more effective modulation ways improve behavior SWCNTs, surface doping effects sodium (Na) atom, typical n-type dopant, and tetracyanoethylene (TCNE), p-type on electronic sensing (7,3), (6,5), (7,5) SWCNTs NO2, SO2, NO, CO2, H2S, NH3 were examined theoretically with density functional theory (DFT) calculations. It is found that decoration Na/TCNE dopant energetically favorable, enhanced/lowered frontier energy levels. Therefore, energy-level alignment among orbitals gas molecules can regulated effectively. The interfacial charge transfer occurs from occupied valence band maximum (VBM) empty lowest unoccupied molecular orbital (LUMO) much significant than between VBM highest (HOMO) molecules. As result, gas-adsorbed cases considered here, carrier concentration increments level (i.e., internal mobility Schottky barrier contact neighboring materials within single-walled nanotube field-effect transistors (SWCNT-FETs)) changed significantly NO2- SO2-adsorbed pristine NO2-, SO2-, NO-adsorbed NO2-adsorbed SWCNTs. Our study highlights key role controlled character dopants play in regulating adsorption selection behaviors practical sensor applications.

Language: Английский

Citations

0
DFT study on the adsorption and sensing of SF6 byproducts“(SO2F2, SO2, SOF2, H2S, and HF)”using Sc and Ti decorated BC6N monolayers DOI
Hamza Ahmad, Yuhuai Liu, Basheer Ahmed Kalwar

et al.

Diamond and Related Materials, Journal Year: 2025, Volume and Issue: unknown, P. 112292 - 112292

Published: April 1, 2025

Language: Английский

Citations

0
Sarin simulants show very limited representativeness DOI Creative Commons
Valentin A. Bureau,

Sébastien Penlou,

Sónia S. Nobre

et al.

The Analyst, Journal Year: 2025, Volume and Issue: unknown

Published: Jan. 1, 2025

In this study, we conducted colorimetric gas-phase tests on real sarin and compared the results with most commonly used simulants under identical test conditions. Our findings indicated that reactivity extrapolation was not a reliable approach validation using toxic gas remained essential for fair assessment of sensors.

Language: Английский

Citations

0
(Hf)PCN-224(Co) as an efficient ppm-level sensor for toxic SO2 DOI
Sergio Carrasco, Marcela Martı́nez, Yoarhy A. Amador‐Sánchez

et al.

Materials Today Advances, Journal Year: 2025, Volume and Issue: 26, P. 100579 - 100579

Published: May 2, 2025

Language: Английский

Citations

0
A density functional theory study on the prediction of stable Be9O9 nanoring and its application as an atmospheric gas (CO, NO and NH3) sensor DOI
Darshil Chodvadiya, J.N. Panchal, Izabela Zgłobicka

et al.

Materials Science in Semiconductor Processing, Journal Year: 2025, Volume and Issue: 196, P. 109672 - 109672

Published: May 16, 2025

Language: Английский

Citations

0
Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process DOI Creative Commons
My Thi Ngoc Nguyen, Jun Seop Lee

Chemosensors, Journal Year: 2024, Volume and Issue: 12(11), P. 233 - 233

Published: Nov. 9, 2024

The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These can be categorized into four groups: acidic and alkaline gases, volatile organic compounds, flammable corrosive greenhouse gases. To meet stricter emission standards, further advancements gas sensor technology essential. This review examines recent research on monitoring these highlighting capabilities limitations of existing technologies. Additionally, paper discusses current challenges sensing proposes future directions for improving

Language: Английский

Citations

2