Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation DOI Creative Commons
Liugang Hu, Kenji Ishikawa, Thi‐Thuy‐Nga Nguyen

et al.

Applied Surface Science, Journal Year: 2024, Volume and Issue: 669, P. 160598 - 160598

Published: Oct. 1, 2024

Graphene sheet transferred onto the SiO2 substrate has various types at different regions such as single-layer graphene (SLG), double-layer (DLG), and multi-layer (MLG). These layers were identified by Raman analysis of 2D band position around 2700 cm−1 full width half maximum (FWHM). The sheets on remotely irradiated oxygen plasma without energetic ions a room temperature. At beginning irradiation, carbons surface oxidized 2D-FWHMs broadened due to an increase defects basal plane. By controlling irradiation time up 120 min, selectively stripping away SLG was observed while leaving other DLG MLG regions. difference in attractive forces resulted favorable desorption carbon atoms occurred remote irradiation.

Language: Английский

Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation DOI Creative Commons
Liugang Hu, Kenji Ishikawa, Thi‐Thuy‐Nga Nguyen

et al.

Applied Surface Science, Journal Year: 2024, Volume and Issue: 669, P. 160598 - 160598

Published: Oct. 1, 2024

Graphene sheet transferred onto the SiO2 substrate has various types at different regions such as single-layer graphene (SLG), double-layer (DLG), and multi-layer (MLG). These layers were identified by Raman analysis of 2D band position around 2700 cm−1 full width half maximum (FWHM). The sheets on remotely irradiated oxygen plasma without energetic ions a room temperature. At beginning irradiation, carbons surface oxidized 2D-FWHMs broadened due to an increase defects basal plane. By controlling irradiation time up 120 min, selectively stripping away SLG was observed while leaving other DLG MLG regions. difference in attractive forces resulted favorable desorption carbon atoms occurred remote irradiation.

Language: Английский

Citations

0