Evaluation of performance and reliability of TFT devices with ultra-thin HfTiO dielectric layer deposited by plasma enhanced atomic layer deposition
Wenzhi Zhang,
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Xiaoying Zhang,
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Zhi-Xuan Zhang
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et al.
Surface and Coatings Technology,
Journal Year:
2025,
Volume and Issue:
497, P. 131782 - 131782
Published: Jan. 14, 2025
Language: Английский
Ferroelectricity in amorphous aluminum oxynitride films synthesized by inductively coupled plasma assisted atomic layer deposition
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena,
Journal Year:
2025,
Volume and Issue:
43(2)
Published: Feb. 11, 2025
Aluminum
nitride-based
ferroelectric
thin
films
show
significant
promise
for
neuromorphic
computing
applications.
Deposition
by
reactive
sputtering,
the
most
common
approach
to
synthesizing
these
materials,
leads
mosaic
disorder
and
point
defects.
To
combat
challenges,
we
use
a
different
demonstrate
growth
of
amorphous
aluminum
oxynitride
(AlON)
inductively
coupled
hydrazine
plasma
enhanced
atomic
layer
deposition
(ALD).
Electrical
property
characterization
using
positive-up
negative-down
measurements
shows
remanent
polarization
1.58
μC
cm−2
in
AlON
grown
at
350
°C
CMOS-compatible
process,
piezoresponse
force
microscopy
hysteresis
poling
experiments
yield
behavior
consistent
with
ferroelectricity.
Furthermore,
sub-5
nm
thick
devices
were
able
be
switched
below
5
V.
Structural
was
performed
x-ray
photoelectron
spectroscopy
depth
profiling,
spectroscopic
ellipsometry,
diffraction,
low-angle
reflectivity
measurements.
ALD
provides
an
alternative
grow
advantages
from
device
scaling
standpoint.
Language: Английский
Exploring resistive switching in flexible, forming-free Ti/NiO/AZO/PET memory device for future wearable electronics
Scientific Reports,
Journal Year:
2025,
Volume and Issue:
15(1)
Published: March 10, 2025
Resistive
Random
Access
Memory
(ReRAM)
is
an
emerging
class
of
non-volatile
memory
that
stores
data
by
altering
the
resistance
a
material
within
cell.
Unlike
traditional
technologies,
ReRAM
operates
using
voltage
to
induce
change
in
metal
oxide
layer,
which
can
then
be
read
as
binary
state
(0
or
1).
In
this
work,
we
present
flexible,
forming-free,
device
aluminium-doped
zinc
(AZO)
electrode
and
nickel
(NiO)
active
layer.
The
fabricated
Ti/NiO/AZO/PET
demonstrates
reliable
bipolar
resistive
switching
(BRS)
with
two
distinct
stable
states,
crucial
for
neuromorphic
computing.
Electrical
tests
showed
high
low
states
set
(VSET)
≈
5.4
V
reset
(VRESET)
2.9
V,
endurance
over
400
cycles
retention
around
10³
seconds.
Different
conduction
mechanisms
were
observed
(HRS)
(LRS)
like
ohmic
space
charge
limited
current
(SCLC).
characterization
under
bending
conditions
demonstrated
device's
performance
reliability,
minimal
variation
VSET
VRESET
values.
These
results
highlight
potential
NiO/AZO-based
flexible
high-density
storage
wearable
electronics
applications.
Language: Английский
Reactive sputtering deposited α-MoO3 thin films for forming-free resistive random-access memory
Zhaoxin Guo,
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Xiaoxu Lai,
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Wenhui Xu
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et al.
Solid-State Electronics,
Journal Year:
2025,
Volume and Issue:
unknown, P. 109130 - 109130
Published: April 1, 2025
Language: Английский
Crystallinity‐controlled volatility tuning of ZrO2 memristor for physical reservoir computing
Dae Kyu Lee,
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Gichang Noh,
No information about this author
Seungmin Oh
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et al.
InfoMat,
Journal Year:
2024,
Volume and Issue:
unknown
Published: Oct. 11, 2024
Abstract
Memristors
have
been
emerging
as
promising
candidates
for
computing
systems
in
post‐Moore
applications,
particularly
electrochemical
metallization‐based
memristors,
which
are
poised
to
play
a
crucial
role
neuromorphic
and
machine
learning.
These
devices
favored
their
high
integration
density,
low
power
consumption,
rapid
switching
speed,
significant
on/off
ratio.
Despite
advancements
various
materials,
achieving
adequate
electrical
performance—characterized
by
threshold
(TS)
behavior,
spontaneous
reset,
off‐state
resistance—remains
challenging
due
the
limitations
conductance
filament
control
within
nanoscale
resistive
layer.
In
this
study,
we
introduce
an
efficient
method
ZrO
2
crystallinity
tunable
volatility
memristor
establishing
paths
through
simple
thermal
treatment
process
single
oxide
The
effect
of
create
localized
enhancing
Ag
migration
improving
TS
behavior
is
also
investigated.
contrast
its
amorphous
counterpart,
crystallized
volatile
memristor,
treated
annealing,
demonstrates
steep
slope
(0.21
mV
dec
–1
),
resistance
state
(25
GΩ),
forming‐free
characteristics.
superior
performance
attributed
conductive
filaments
along
low‐energy
pathways,
such
dislocations
grain
boundaries.
By
coupling
with
enhanced
believe
that
finely
tuned
function
short‐term
memory
reservoir
computing,
making
it
well‐suited
tasks
audio
image
recognition.
Language: Английский
True random number generator using stochastic noise signal of memristor with variation tolerance
Dongsheng Yu,
No information about this author
Suhyeon Ahn,
No information about this author
Sangwook Youn
No information about this author
et al.
Chaos Solitons & Fractals,
Journal Year:
2024,
Volume and Issue:
189, P. 115708 - 115708
Published: Nov. 11, 2024
Language: Английский
Enhanced Transparency and Resistive Switching Characteristics in AZO/HfO2/Ti RRAM Device via Post Annealing Process
Yuseong Jang,
No information about this author
Chanmin Hwang,
No information about this author
Seokhwan Bang
No information about this author
et al.
Inorganics,
Journal Year:
2024,
Volume and Issue:
12(12), P. 299 - 299
Published: Nov. 21, 2024
As
interest
in
transparent
electronics
increases,
ensuring
the
reliability
of
RRAM
(T-RRAM)
devices,
which
can
be
used
to
construct
electronics,
has
become
increasingly
important.
However,
defects
and
traps
within
these
T-RRAM
devices
degrade
their
reliability.
In
this
study,
we
investigated
improvement
transparency
with
an
AZO/HfO2/Ti
structure
through
rapid
thermal
annealing
(RTA)
at
450
°C
for
60
s
a
nitrogen
atmosphere.
The
device
without
RTA
exhibited
low
transmittance
30%,
whereas
showed
significantly
higher
over
75%.
Furthermore,
operated
lower
current
levels
after
RTA,
resulted
reduction
its
operating
voltages,
forming,
setting,
reset
voltages
changed
from
3.3,
2.4,
−5.1
V,
respectively,
2,
1,
−2.7
V.
This
led
endurance
characteristics
device,
thereby
suggests
that
improvements
attributed
trap
density
caused
by
RTA.
Language: Английский
Multilevel Resistive Switching Dynamics by Controlling Phase and Self‐Assembled Nanochannels in HfO2
Small,
Journal Year:
2024,
Volume and Issue:
unknown
Published: Dec. 5, 2024
Abstract
A
resistive
switching
device
with
precise
control
over
the
formation
of
conductive
filaments
(CF)
holds
immense
potential
for
high‐density
memory
arrays
and
atomic‐scale
in‐memory
computing
architectures.
While
ion
migration
electrochemical
mechanisms
are
well
understood,
controlling
evolution
CF
remains
challenging
practical
random‐access
(RRAM)
deployment.
This
study
introduces
a
systematic
approach
to
modulate
oxygen
vacancies
(OV)
in
HfO
2
films
Ag/HfO
/Pt‐based
RRAM
devices
by
substrate
temperature.
At
300
°C,
film
exhibits
dominant
monoclinic
phase
maximum
OV
concentration,
which
plays
key
role
achieving
optimal
multilevel
behavior.
Self‐assembled
nanochannels
guide
evolution,
diffusion
Ag
at
inside
these
suggests
synergistic
interplay
between
Ag⁺
reseting
voltage‐controlled
states.
addresses
endurance/retention
trade‐off
an
impressive
R
on
/R
off
ratio
≈8000
while
demonstrating
growth
temperature‐driven
modulation
as
tool
multi‐bit
data
storage.
These
findings
provide
blueprint
developing
high‐performance
oxide‐based
offer
valuable
insights
into
mechanisms,
paving
way
future
low‐power,
technologies.
Language: Английский