Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process

Chemosensors, Journal Year: 2024, Volume and Issue: 12(11), P. 233 - 233

Published: Nov. 9, 2024

The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These can be categorized into four groups: acidic and alkaline gases, volatile organic compounds, flammable corrosive greenhouse gases. To meet stricter emission standards, further advancements gas sensor technology essential. This review examines recent research on monitoring these highlighting capabilities limitations of existing technologies. Additionally, paper discusses current challenges sensing proposes future directions for improving

Language: Английский

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Polymer template assisted construction of spherical Co3O4@meso-SiO2 yolk-shell nanoreactors for catalytic combustion of volatile organic compounds

Chemical Engineering Journal, Journal Year: 2023, Volume and Issue: 480, P. 148173 - 148173

Published: Dec. 19, 2023

Language: Английский

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Encapsulating platinum nanoparticles into multi-hollow silicalite-1 zeolite for catalytic oxidation of volatile organic compounds

Chemical Engineering Science, Journal Year: 2023, Volume and Issue: 286, P. 119674 - 119674

Published: Dec. 23, 2023

Language: Английский

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Application of Unconventional External-Field Treatments in Air Pollutants Removal over Zeolite-Based Adsorbents/Catalysts

Catalysts, Journal Year: 2023, Volume and Issue: 13(12), P. 1461 - 1461

Published: Nov. 23, 2023

Zeolite-based materials are widely used as adsorbents and catalysts for purifying air pollutants like NOx VOCs due to abundant pore structure, regular distribution, numerous ion exchange sites. Thermal treatment is a necessary procedure both removing impurities in pores promoting the metal active dispersed evenly before zeolite-based adsorbents/catalysts were applied NOx/VOCs. Nevertheless, conventional thermal field (i.e., high-temperature calcination, purging, etc.) takes large energy consumption. In contrast, unconventional external-field treatments such non-thermal plasma microwave show significant advantages of high efficiency, low consumption well pollution, which substitute traditional many fields. this paper, roles or adsorption/catalysis NOx/VOCs reviewed from three aspects assisting activation materials, cooperative catalysis process, zeolites synthesis. The reasons improving textural properties, sites, performance, etc. illuminated detail. Moreover, influences various parameters power, time, temperature, on above elaborated. It hoped that review could provide some advanced guidance researchers develop highly efficient materials.

Language: Английский

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Uncovering socio-economic driving forces of volatile organic compounds emissions in the Beijing-Tianjin-Hebei region of China

Environmental Impact Assessment Review, Journal Year: 2024, Volume and Issue: 109, P. 107638 - 107638

Published: Aug. 29, 2024

Language: Английский

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