Exploring the effect of three-item hybrid fixed abrasive pads on their lapping processing performance of quartz glass DOI
Zhankui Wang,

Fengsong Dong,

Shangci Huang

et al.

Materials Science in Semiconductor Processing, Journal Year: 2024, Volume and Issue: 188, P. 109183 - 109183

Published: Dec. 9, 2024

Language: Английский

Effect mechanism of diamond content on tribo-chemical processing of sapphire wafers using developed clusters of diamond and ceria chemically agglomerated abrasive cluster DOI
Zhankui Wang,

Shangci Huang,

Kuncheng Liu

et al.

Ceramics International, Journal Year: 2025, Volume and Issue: unknown

Published: March 1, 2025

Language: Английский

Citations

0
Exploring the effect of three-item hybrid fixed abrasive pads on their lapping processing performance of quartz glass DOI
Zhankui Wang,

Fengsong Dong,

Shangci Huang

et al.

Materials Science in Semiconductor Processing, Journal Year: 2024, Volume and Issue: 188, P. 109183 - 109183

Published: Dec. 9, 2024

Language: Английский

Citations

0