MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications DOI Creative Commons
Qingyi Wang, Yang Zhang, Sizhe Cheng

et al.

Micromachines, Journal Year: 2024, Volume and Issue: 16(1), P. 43 - 43

Published: Dec. 30, 2024

MEMS acoustic sensors are a type of physical quantity sensor based on manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect energy, and use certain transduction principles read out the generated strain, thereby obtaining targeted signal's information, its intensity, direction, distribution. Due their advantages in miniaturization, low power consumption, high precision, consistency, repeatability, reliability, ease integration, widely applied many areas, consumer electronics, industrial perception, military equipment, health monitoring. Through different sensing mechanisms, they can be used detect energy density, pressure distribution, wave direction. This article focuses piezoelectric, piezoresistive, capacitive, optical sensors, showcasing development recent years, well innovations structure, process, design methods. Then, this review compares performance devices with similar working principles. have been increasingly fields, including traditional advantage areas microphones, stethoscopes, hydrophones, ultrasound imaging, cutting-edge fields biomedical wearable implantable devices.

Language: Английский

MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications DOI Creative Commons
Qingyi Wang, Yang Zhang, Sizhe Cheng

et al.

Micromachines, Journal Year: 2024, Volume and Issue: 16(1), P. 43 - 43

Published: Dec. 30, 2024

MEMS acoustic sensors are a type of physical quantity sensor based on manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect energy, and use certain transduction principles read out the generated strain, thereby obtaining targeted signal's information, its intensity, direction, distribution. Due their advantages in miniaturization, low power consumption, high precision, consistency, repeatability, reliability, ease integration, widely applied many areas, consumer electronics, industrial perception, military equipment, health monitoring. Through different sensing mechanisms, they can be used detect energy density, pressure distribution, wave direction. This article focuses piezoelectric, piezoresistive, capacitive, optical sensors, showcasing development recent years, well innovations structure, process, design methods. Then, this review compares performance devices with similar working principles. have been increasingly fields, including traditional advantage areas microphones, stethoscopes, hydrophones, ultrasound imaging, cutting-edge fields biomedical wearable implantable devices.

Language: Английский

Citations

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