Sensors, Journal Year: 2025, Volume and Issue: 25(7), P. 1990 - 1990
Published: March 22, 2025
Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size high accuracy requirements of gratings, considering need for efficiency low cost, fabrication is extremely difficult. This paper reviews technologies including grating tiling technology, ruling single-exposure lithography, optical mosaic scanning beam interference lithography. It introduces basic principles, representative research, research progress these technologies, analyzes their advantages current problems, provides reference development optimization gratings.
Language: Английский