Wafer-Scale Integration of Metal Oxide Nanocrystals on Gas Sensor Chips via Direct Lithographic Patterning DOI

Zichao Tang,

Fu Li, Peng Miao

et al.

ACS Sensors, Journal Year: 2025, Volume and Issue: unknown

Published: May 6, 2025

Nanomaterial-based gas sensors are essential due to their high sensitivity and scalability, enabling efficient detection across diverse applications. However, a key challenge hindering practical applications is the variation in sensing performance between devices. Addressing this requires careful consideration of relationship on-chip materials miniaturized As feature sizes reduce microscale, accurately uniformly positioning nanomaterials onto specific regions device electrodes becomes increasingly difficult. This arises from incompatibility bottom-up nanomaterial synthesis methods top-down lithography-based fabrication processes. Herein, we introduce cleanroom-compatible workflow for chemiresistive employing direct lithographic patterning metal oxide nanocrystals. Gas located different 4 in. wafer exhibit highly consistent gas-sensing performances, highlighting potential approach, which integrates strengths both approaches. approach opens new opportunities integrating wide range synthesized functional into types chemical sensors.

Language: Английский

Wafer-Scale Integration of Metal Oxide Nanocrystals on Gas Sensor Chips via Direct Lithographic Patterning DOI

Zichao Tang,

Fu Li, Peng Miao

et al.

ACS Sensors, Journal Year: 2025, Volume and Issue: unknown

Published: May 6, 2025

Nanomaterial-based gas sensors are essential due to their high sensitivity and scalability, enabling efficient detection across diverse applications. However, a key challenge hindering practical applications is the variation in sensing performance between devices. Addressing this requires careful consideration of relationship on-chip materials miniaturized As feature sizes reduce microscale, accurately uniformly positioning nanomaterials onto specific regions device electrodes becomes increasingly difficult. This arises from incompatibility bottom-up nanomaterial synthesis methods top-down lithography-based fabrication processes. Herein, we introduce cleanroom-compatible workflow for chemiresistive employing direct lithographic patterning metal oxide nanocrystals. Gas located different 4 in. wafer exhibit highly consistent gas-sensing performances, highlighting potential approach, which integrates strengths both approaches. approach opens new opportunities integrating wide range synthesized functional into types chemical sensors.

Language: Английский

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