Published: June 15, 2024
Language: Английский
Physical Review Applied, Journal Year: 2025, Volume and Issue: 23(3)
Published: March 12, 2025
Language: Английский
Citations
1
Physica C Superconductivity, Journal Year: 2025, Volume and Issue: unknown, P. 1354652 - 1354652
Published: Jan. 1, 2025
Language: Английский
Citations
0
Journal of Applied Physics, Journal Year: 2025, Volume and Issue: 137(4)
Published: Jan. 28, 2025
Tantalum films incorporated into superconducting circuits have exhibited low surface losses, resulting in long-lived qubit states. The remaining loss pathways originate microscopic defects that manifest as two level systems (TLSs) at temperatures. These limit performance, so careful attention to tantalum film structures is critical for optimal use quantum devices. In this work, we investigate the growth of using magnetron sputtering on sapphire, Si, and photoresist substrates. case present procedures fully-oriented with α-Ta [1 1 1]//Al2O3 [0 0 1] −1 0]//Al2O3 0] orientational relationships having residual resistivity ratio (RRR) ∼ 60 220 nm thick films. On find a complex grain texturing Ta normal substrate RRR 30. We further demonstrate airbridge fabrication Nb nucleate surfaces. For resonators show TLS-limited quality factors 1.3 ± 0.3 × 106 10 mK (for waveguide gap conductor width 3 6 μm, respectively). Structural characterization scanning electron microscopy, x-ray diffraction, temperature transport, secondary ion mass spectrometry, transmission microscopy reveal dependence impurities screw dislocation density processing conditions. results provide practical insights advanced devices including arrays guide future works crystallographically deterministic fabrication.
Language: Английский
Citations
0
Published: June 15, 2024
Language: Английский
Citations
0