Low-energy N+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate, hexamethyldisiloxane, or hexamethyldigermane DOI Creative Commons
Satoru Yoshimura, Takae Takeuchi, Masato Kiuchi

et al.

AIP Advances, Journal Year: 2024, Volume and Issue: 14(9)

Published: Sept. 1, 2024

In this study, we conducted an experiment in which a source material was sprayed onto substrate with simultaneous N+ ion beam injections. Hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS) used as material. The energy of ions set at 100 eV. temperature room temperature. As result each trial, film deposited on the both HMDSO and TEOS cases. analyzed by x-ray photoelectron spectroscopy (XPS) Fourier transform infrared (FTIR) spectroscopy. We found that silicon dioxide nitrogen atoms (2–4 at. %) were included film. For comparison, trial also hexamethyldigermane (HMDG) 30 eV Although HMDG had no oxygen its molecule, XPS FTIR results showed germanium oxide containing (2 %).

Language: Английский

Multilayered heterojunction-based zinc oxide nanoneedles/polyaniline/titania nanoparticles as a self-powered ultraviolet light photodetector DOI
Shahruz Nasirian,

Fatemeh Sarouzeh Rostami,

Fatemeh Zahra Moradtabar Azizi

et al.

Sensors and Actuators A Physical, Journal Year: 2024, Volume and Issue: unknown, P. 115931 - 115931

Published: Sept. 1, 2024

Language: Английский

Citations

1

Interconnect‐Integrated GaInP/AlGaAs Schottky Photodetector Array with Heterojunction‐Assisted Enhanced Photovoltaic Effect for Automotive Speed Measurement Systems DOI Open Access

Wenbo Yue,

Tu Zhao,

Bing Wang

et al.

Advanced Optical Materials, Journal Year: 2024, Volume and Issue: 12(34)

Published: Aug. 26, 2024

Abstract Reducing power consumption has always been a pressing issue for integrated circuits. Currently, there is strong interest in the development of self‐powered photodetectors with low consumption, high quantum efficiency, and integration. In this work, novel GaInP/AlGaAs photodetector developed, where photovoltaic effect Schottky junction enhanced by assistance underneath heterojunction, achieving near unity integration, ultrafast response speed. A single device exhibits responsivity (R) 467 mA W −1 mode, specific detectivity (D * ) 1.43 × 10 11 Jones, conversion efficiency (PCE) 14.5%, an external (EQE) 96.56%. Further, interconnect integration technique used to integrate 81 individual detector units onto 5 mm 2 chip, resulting array that significantly improves optical response. The frequency feature fast 19 µs −3 dB bandwidth 21.34 kHz. chip further STM32 realize automotive speed measurement system. This work provides technological solution high‐frequency, highly using heterojunction‐assisted GaInP junctions.

Language: Английский

Citations

0

Low-energy N+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate, hexamethyldisiloxane, or hexamethyldigermane DOI Creative Commons
Satoru Yoshimura, Takae Takeuchi, Masato Kiuchi

et al.

AIP Advances, Journal Year: 2024, Volume and Issue: 14(9)

Published: Sept. 1, 2024

In this study, we conducted an experiment in which a source material was sprayed onto substrate with simultaneous N+ ion beam injections. Hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS) used as material. The energy of ions set at 100 eV. temperature room temperature. As result each trial, film deposited on the both HMDSO and TEOS cases. analyzed by x-ray photoelectron spectroscopy (XPS) Fourier transform infrared (FTIR) spectroscopy. We found that silicon dioxide nitrogen atoms (2–4 at. %) were included film. For comparison, trial also hexamethyldigermane (HMDG) 30 eV Although HMDG had no oxygen its molecule, XPS FTIR results showed germanium oxide containing (2 %).

Language: Английский

Citations

0