
Deleted Journal, Journal Year: 2025, Volume and Issue: 20(1)
Published: Feb. 21, 2025
Abstract This paper presents an innovative approach to fabricating dual-functional hybrid silicon nanowire (SiNW) arrays that demonstrate antireflection and Surface-Enhanced Raman Scattering (SERS) potentials. Three-beam laser interference lithography (TBLIL) is used create fringe patterns on a Si substrate, which serves as template for subsequent NWs creation. Subsequently, metal-assisted chemical etching (MACE) selectively etched the substrate stimulated formation of SiNWs with various aspect ratios. The morphological optical features were characterized by scanning electron microscopy (SEM), finite difference time domain (FDTD), spectroscopy. resulting structured surface morphology effectively reduced reflection losses at wavelengths. spectra rhodamine 6G (R6G) analytes concentrations 10 –4 –8 are examined, indicating signals significantly enhanced had long-term stability reliability. characteristic peaks R6G observed 620, 1361, 1660 cm −1 , potentially useful in sensitive sensors.
Language: Английский