DOF Enhanced via the Multi-Wavelength Method for the Moiré Fringe-Based Alignment DOI Creative Commons

Kairui Zhang,

Haifeng Sun,

Dajie Yu

et al.

Micromachines, Journal Year: 2025, Volume and Issue: 16(3), P. 356 - 356

Published: March 20, 2025

Alignment systems are core subsystems of lithography, which directly affect the overlay accuracy lithography process. The Moiré fringe-based alignment method has advantages high precision and low complexity. However, this is highly sensitive to variations in gap between wafer mask. To enhance performance alignment, paper proposes a novel multi-wavelength approach used imaging depth focus (DOF). We use light illuminate marks on mask, combined with different sources. Then, we improved phase analysis algorithm analyze contrast fringe calculate displacement. Experiments show that, an range 1000 μm, effective DOF can exceed 400 μm. It evidenced that unaffected remains at nanometer level. Otherwise, parameter optimization, expected be further extended.

Language: Английский

Trends and Advances in Wearable Plasmonic Sensors Utilizing Surface-Enhanced Raman Spectroscopy (SERS): A Comprehensive Review DOI Creative Commons
Svetlana N. Khonina, Nikolay L. Kazanskiy

Sensors, Journal Year: 2025, Volume and Issue: 25(5), P. 1367 - 1367

Published: Feb. 23, 2025

Wearable sensors have appeared as a promising solution for real-time, non-invasive monitoring in diverse fields, including healthcare, environmental sensing, and wearable electronics. Surface-enhanced Raman spectroscopy (SERS)-based leverage the unique properties of SERS, such plasmonic signal enhancement, high molecular specificity, potential single-molecule detection, to detect identify wide range analytes with ultra-high sensitivity selectivity. However, it is important note that utilize various sensing mechanisms, not all rely on SERS technology, their design depends specific application. This comprehensive review highlights recent trends advancements technologies, focusing design, fabrication, integration into practical devices. Key innovations material selection, use nanomaterials flexible substrates, significantly enhanced sensor performance wearability. Moreover, we discuss challenges miniaturization, power consumption, long-term stability, along solutions address these issues. Finally, outlook technologies presented, emphasizing need interdisciplinary research drive next generation smart wearables capable real-time health diagnostics, monitoring, beyond.

Language: Английский

Citations

2

Unified neural network model for predicting optical responses in gold nanostructures DOI Creative Commons

Xiaobo Wang,

Yu Cao,

Feng Feng

et al.

Journal of Applied Physics, Journal Year: 2025, Volume and Issue: 137(6)

Published: Feb. 10, 2025

In this paper, we present a deep neural network model capable of simultaneously predicting the optical transmittance spectra three distinct gold nanostructures: nanodisks, truncated cones, and nanocones. Our achieved mean squared error loss as low 0.0015. By systematically varying geometric parameters, generated comprehensive dataset to train model, which captures complex dependencies between structure response. A key finding is redshift in resonance dip associated with increasing sidewall tilt. We further validated by comparing its predictions experimental results, showing excellent agreement. This work demonstrates powerful, data-driven approach for rapid design optimization plasmonic nanostructures, opening new possibilities nanophotonic applications.

Language: Английский

Citations

0

Nanomaterials for Energy Storage Systems—A Review DOI Creative Commons
H. Mohammed,

Md Farouq Mia,

J. Wendell Wiggins

et al.

Molecules, Journal Year: 2025, Volume and Issue: 30(4), P. 883 - 883

Published: Feb. 14, 2025

The ever-increasing global energy demand necessitates the development of efficient, sustainable, and high-performance storage systems. Nanotechnology, through manipulation materials at nanoscale, offers significant potential for enhancing performance devices due to unique properties such as increased surface area improved conductivity. This review paper investigates crucial role nanotechnology in advancing technologies, with a specific focus on capacitors batteries, including lithium-ion, sodium-sulfur, redox flow. We explore diverse applications nanomaterials encompassing electrode (e.g., carbon nanotubes, metal oxides), electrolytes, separators. To address challenges like interfacial side reactions, advanced nanostructured are being developed. also delve into various manufacturing methods nanomaterials, top-down ball milling), bottom-up chemical vapor deposition), hybrid approaches, highlighting their scalability considerations. While cost-effectiveness environmental concerns persist, outlook remains promising, emerging trends solid-state batteries integration artificial intelligence optimized storage.

Language: Английский

Citations

0

A Comprehensive Review of Quality Control and Reliability Research in Micro–Nano Technology DOI Creative Commons

Nowshin Sharmile,

Risat Rimi Chowdhury,

Salil Desai

et al.

Technologies, Journal Year: 2025, Volume and Issue: 13(3), P. 94 - 94

Published: March 1, 2025

This paper presents a comprehensive review of quality control (QC) and reliability research in micro–nano technology, which is vital for advancing microelectronics, biomedical engineering, manufacturing. Micro- nanotechnologies operate at different scales, yet both require precise to ensure the performance durability small-scale systems. synthesizes key methodologies, including statistical methods, machine learning AI-driven advanced techniques emphasizing their relevance nanotechnology applications. The also discusses application micro/nanotechnology other technological areas. discussion extends unique challenges posed by systems, such as failure modes related stiction, material fatigue, environmental factors. Advanced testing modeling approaches are highlighted effectiveness predicting mitigating risks. Additionally, explores integration emerging technologies enhance improve By examining established novel techniques, this underscores evolving nature field. It identifies areas future investigation, particularly adaptation these methods increasing complexity concludes proposing directions that can further optimize continued advancement industrial technologies.

Language: Английский

Citations

0

DOF Enhanced via the Multi-Wavelength Method for the Moiré Fringe-Based Alignment DOI Creative Commons

Kairui Zhang,

Haifeng Sun,

Dajie Yu

et al.

Micromachines, Journal Year: 2025, Volume and Issue: 16(3), P. 356 - 356

Published: March 20, 2025

Alignment systems are core subsystems of lithography, which directly affect the overlay accuracy lithography process. The Moiré fringe-based alignment method has advantages high precision and low complexity. However, this is highly sensitive to variations in gap between wafer mask. To enhance performance alignment, paper proposes a novel multi-wavelength approach used imaging depth focus (DOF). We use light illuminate marks on mask, combined with different sources. Then, we improved phase analysis algorithm analyze contrast fringe calculate displacement. Experiments show that, an range 1000 μm, effective DOF can exceed 400 μm. It evidenced that unaffected remains at nanometer level. Otherwise, parameter optimization, expected be further extended.

Language: Английский

Citations

0