Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures DOI Creative Commons
Xiaolei Bi, Xuemin Li, Bin Li

et al.

Micromachines, Journal Year: 2025, Volume and Issue: 16(5), P. 518 - 518

Published: April 28, 2025

Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied the manufacturing of high performance. In this paper, several typical application fields technology reasons for its these elaborated detail. Several with introduced The research progress micromachining structures, such as DRIE, UV-LIGA, micro-milling, LTCC, 3D printing, electrochemical micromachining, is discussed Finally, advantages disadvantages micro-rectangular discussed, results show that micro-nano printing relatively promising methods high-frequency structures.

Language: Английский

Sub‐Skin‐Depth Nanoslit Integrated Topological Insulator Devices for Self‐Driven Broadband Terahertz Detection and Imaging DOI Open Access
Shiqi Lan, Han Li, Chenyu Yao

et al.

Laser & Photonics Review, Journal Year: 2025, Volume and Issue: unknown

Published: March 25, 2025

Abstract The advancement of terahertz technology is primarily fueled by the imperative for room‐temperature operation with high sensitivity, integration, and broadband detection capabilities. Nevertheless, traditional semiconductor materials in detectors continue to grapple obstacles, notably intricate integration processing complexities. unique electronic structures non‐trivial topological properties two‐dimensional bring new possibilities perspectives high‐performance low‐energy photon detection. Here, an antenna combined insulator GeBi 4 Te 7 ultrashort channel technique utilized significantly enhance electromagnetic response a confined region compressing localizing optical field spatial dimension. This strategy achieves preferential flow hot carriers through enhanced light‐matter interactions while satisfying bandwidth speed detector. sensitivity detector 3.04 A·W −1 at 0.81 THz noise equivalent power less than 15.8 pW·Hz −0.5 time 5 µs. These research results provide brand‐new opportunity develop highly sensitive, integrated, detectors, enabling exploration across diverse array application domains.

Language: Английский

Citations

0

Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures DOI Creative Commons
Xiaolei Bi, Xuemin Li, Bin Li

et al.

Micromachines, Journal Year: 2025, Volume and Issue: 16(5), P. 518 - 518

Published: April 28, 2025

Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied the manufacturing of high performance. In this paper, several typical application fields technology reasons for its these elaborated detail. Several with introduced The research progress micromachining structures, such as DRIE, UV-LIGA, micro-milling, LTCC, 3D printing, electrochemical micromachining, is discussed Finally, advantages disadvantages micro-rectangular discussed, results show that micro-nano printing relatively promising methods high-frequency structures.

Language: Английский

Citations

0