Vacuum, Journal Year: 2024, Volume and Issue: 229, P. 113572 - 113572
Published: Aug. 22, 2024
Language: Английский
Vacuum, Journal Year: 2024, Volume and Issue: 229, P. 113572 - 113572
Published: Aug. 22, 2024
Language: Английский
Journal of Materials Processing Technology, Journal Year: 2025, Volume and Issue: 337, P. 118712 - 118712
Published: Jan. 7, 2025
Language: Английский
Citations
10ACS Applied Nano Materials, Journal Year: 2025, Volume and Issue: unknown
Published: Feb. 21, 2025
Language: Английский
Citations
1Sensors, Journal Year: 2024, Volume and Issue: 24(20), P. 6617 - 6617
Published: Oct. 14, 2024
The unique diffractive properties of gratings have made them essential in a wide range applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements micro- nanotechnologies, the demand for more precise efficient grating fabrication has increased. This review discusses latest manufacturing techniques, particularly highlighting interference lithography, which excels sub-beam generation through wavefront amplitude division. Techniques such as Lloyd's mirror configurations produce stable fringe fields patterning single exposure. Orthogonal non-orthogonal, two-axis interferometers advanced two-dimensional large-area gratings, respectively, while combined with concave lenses enables creation gratings. Grating interferometry, utilizing principles, allows highly measurements minute displacements at nanometer to sub-nanometer scale. also examines application interferometry high-precision, absolute, multi-degree-of-freedom measurement systems. Progress significantly spectrometer integrated structures Fresnel grating-microlens arrays driving miniaturization spectrometers expanding their use compact analytical instruments.
Language: Английский
Citations
5Journal of Materials Processing Technology, Journal Year: 2025, Volume and Issue: unknown, P. 118851 - 118851
Published: April 1, 2025
Language: Английский
Citations
0European Journal of Mechanics - A/Solids, Journal Year: 2024, Volume and Issue: 109, P. 105500 - 105500
Published: Nov. 13, 2024
Language: Английский
Citations
3Materials Science in Semiconductor Processing, Journal Year: 2024, Volume and Issue: 185, P. 108868 - 108868
Published: Sept. 2, 2024
Language: Английский
Citations
1Materials Today Communications, Journal Year: 2024, Volume and Issue: unknown, P. 110642 - 110642
Published: Oct. 1, 2024
Language: Английский
Citations
1Materials Today Communications, Journal Year: 2024, Volume and Issue: unknown, P. 110792 - 110792
Published: Oct. 1, 2024
Language: Английский
Citations
1Journal of The Electrochemical Society, Journal Year: 2024, Volume and Issue: 171(11), P. 117522 - 117522
Published: Nov. 1, 2024
Strip ultramicroelectrodes (SUE) have been widely used in micro-nano manufacturing, trace element detection, and energy storage. Preparation of SUE is thus the basis for these applications. A method preparation its array (SUEA) proposed based on a nanoskiving technique. The effects embedding materials storage methods electrode stability were investigated. continuous stable working time 120 min 92 h achieved. Furthermore, effect nanowire feature dimensions electrochemical properties was analyzed. Parameters such as steady-state limiting current reversible electron transfer evaluated. Compared to SUE, SUEA exhibits ten-fold increase current. findings this study provide an approach obtain high-performance which will promote practical application micro/nano detection.
Language: Английский
Citations
1Vacuum, Journal Year: 2024, Volume and Issue: 229, P. 113572 - 113572
Published: Aug. 22, 2024
Language: Английский
Citations
0